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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title Transcription
- ナンXセン リソグラフィーヨウ コウゲン オヨビ コウガクケイ ノ カイハツ
- Author/Editor
- 波岡武, 東北大学
- Author Heading
- 波岡, 武 ナミオカ, タケシ
- Publication Date
- 1984-1985
- Publication Date (W3CDTF)
- 19841985
- Extent
- 冊
- Additional Title
- 研究種目 試験研究
- Text Language Code
- jpn