RTP 2003 : 11th IEEE international conference on advanced thermal processing of semiconductors : September 23-26, 2003 : The Westin Francis Marion Hotel, Charleston, SC. : Sep 2003, Charleston, SC.

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Material Type: 図書
ISBN: 0780378741
Title: RTP 2003 : 11th IEEE international conference on advanced thermal processing of semiconductors : September 23-26, 2003 : The Westin Francis Marion Hotel, Charleston, SC. : Sep 2003, Charleston, SC.
Author Heading: Gelpey, Jeffrey C.
International Conference on Advanced Thermal Processing of Semiconductors (11th : 2003 : Charleston, S.C.)
Publication, Distribution, etc.: Piscataway : IEEE
Publication Date: c2003.
Publication Date (W3CDTF): 2003
Extent: xi, 220 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors -- Heat treatment. -- Congresses.
Rapid thermal processing -- Congresses.
Semiconductor doping -- Congresses.
Semiconductors -- Defects. -- Congresses.
NDLC: M17
Note (General): Program and papers.
IEEE cat no 03EX696.
Note (Bibliography): Includes bibliographical references.
Note (Additional Physical Form Available): Also available via the World Wide Web.
Holding library: 国立国会図書館
Call No.: M17-04-2044
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007321834
http://id.ndl.go.jp/bib/000007321834
LC Control Number: 2003078741
https://lccn.loc.gov/2003078741
RLIN No.: MOHG53323576-B
Bibliographic Record Category (NDL): 215