図書

International Conference on Electrical Engineering 2004 : joint conference with Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004 : ICEE 2004 : conference proceedings : July 4-8, 2004, Sapporo Convention Center, Sapporo, Japan v. 3-2

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International Conference on Electrical Engineering 2004 : joint conference with Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004 : ICEE 2004 : conference proceedings : July 4-8, 2004, Sapporo Convention Center, Sapporo, Japan. v. 3-2

Call No. (NDL)
M18-B366
Bibliographic ID of National Diet Library
000007416915
Material type
図書
Author
organized by the Institute of Electrical Engineers of Japan
Publisher
[The Institute of Electrical Engineers of Japan]
Publication date
[2004]
Material Format
Paper
Capacity, size, etc.
p. 583-1322, 27 p. ; 30 cm
NDC
-
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Table of Contents

  • CONTENTS

  • Sensors & Micro-machines

  • Emerging MEMS Devices

  • OA1-1 Electrical Feedthrough in Glass for Water Level Packaging and Arrayed MEMS/ 1

    Masayoshi Esashi (New Industry Creation Hatchery Center (NICHe), Tohoku University, Japan)

  • OA1-2 PZT Cantilever Array with Piezoelectric Sensor and Thermo-mechanical Heater for Probe-based Nano-data-storage/ 7

    Young Sik Kim (D3 Group, LG Electronics Institute of Technology, Korea)||Caroline Sunyong Lee (D3 Group, LG Electronics Institute of Technology, Korea)||Wong Hyeog Jin (D3 Group, LG Electronics Institute of Technology, Korea)||SeongSoo Jang (D3 Group, LG Electronics Institute of Technology, Korea)||Hyo Jin Nam (D3 Group, LG Electronics Institute of Technology, Korea)||Jong Uk Bu (D3 Group, LG Electronics Institute of Technology, Korea)

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Paper

Material Type
図書
ISBN (set)
4-88686-000-1 (set)
Title
International Conference on Electrical Engineering 2004 : joint conference with Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004 : ICEE 2004 : conference proceedings : July 4-8, 2004, Sapporo Convention Center, Sapporo, Japan
Volume
v. 3-2
Author/Editor
organized by the Institute of Electrical Engineers of Japan
Author Heading
電気学会 デンキ ガッカイ ( 00259505 )Authorities
Publication, Distribution, etc.
[Tokyo] : [The Institute of Electrical Engineers of Japan]
Publication Date
[2004]
Publication Date (W3CDTF)
2004
Extent
p. 583-1322, 27 p.