Performance analysis of semiconductor manufacturing systems

Performance analysis of semiconductor manufacturing systems

Call No. (NDL): UT51-2004-E218
Bibliographic ID of National Diet Library: 000007422833

Material type: 博士論文

Author: 有馬澄佳 [著]

Publisher: [有馬澄佳]

Publication date: 2003

Material Format: Paper

Capacity, size, etc.: 1冊

Name of awarding university/degree: 会津大学,博士 (コンピュータ理工学)

Notes on use

Note (General)：: 博士論文

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Paper

Material Type: 博士論文
Title: Performance analysis of semiconductor manufacturing systems
Author/Editor: 有馬澄佳 [著]
Author Heading: 有馬, 澄佳アリマ, スミカ
Publication, Distribution, etc.: [有馬澄佳]
Publication Date: 2003
Publication Date (W3CDTF): 2003
Extent: 1冊
Alternative Title: 半導体生産システムの性能解析に関する研究ハンドウタイセイサンシステムノセイノウカイセキニカンスルケンキュウ
Degree grantor/type: 会津大学
Date Granted: 平成15年3月25日
Date Granted (W3CDTF): 2003
Dissertation Number: 甲第C4号
Degree Type: 博士 (コンピュータ理工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2004-E218
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007422833
http://id.ndl.go.jp/bib/000007422833
Bibliographic Record Category (NDL): 213