A study of tantalum oxide-based thin films formed by metalorganic decomposition

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Material Type: 博士論文
Title: A study of tantalum oxide-based thin films formed by metalorganic decomposition
Author/Editor: Kazi Mohammad Abdus Salam [著]
Author Heading: Salam, Kazi Mohammad Abdus サラム, カジモハマドアブドス
Publication, Distribution, etc.: [Kazi Mohammad Abdus Salam]
Publication Date: 2004
Publication Date (W3CDTF): 2004
Extent: 1冊
Alternative Title: 有機金属分解法による酸化タンタル薄膜形成に関する研究ユウキキンゾクブンカイホウニヨルサンカタンタルハクマクケイセイニカンスルケンキュウ
Degree grantor/type: 室蘭工業大学
Date Granted: 平成16年3月23日
Date Granted (W3CDTF): 2004
Dissertation Number: 甲第201号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2004-F542
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007440186
http://id.ndl.go.jp/bib/000007440186
Bibliographic Record Category (NDL): 213