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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- MOVPEホウ ニ ヨリ セイチョウシタ AlN エピタキシャルマク ト ソノ オウヨウ ニ カンスル ケンキュウ
- Author/Editor
- 柴田智彦 [著]
- Author Heading
- 柴田, 智彦 シバタ, トモヒコ
- Publication, Distribution, etc.
- Publication Date
- 2004
- Publication Date (W3CDTF)
- 2004
- Extent
- 1冊
- Alternative Title
- Study on AlN epitaxial films grown by MOVPE method and their applications