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Advances in mirror technology for x-ray, EUV lithography, laser, and other applications 2 : 5 August 2004 : Denver, Colorado, USA. : conference advances in mirror technology for x-ray, EUV lithography, laser, and other applications 2 : 49th annual meeting of SPIE's international symposium on optical science and technology : Aug 2004, Denver, CO. (SPIE Proceedings ; 5533)

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Advances in mirror technology for x-ray, EUV lithography, laser, and other applications 2 : 5 August 2004 : Denver, Colorado, USA. : conference advances in mirror technology for x-ray, EUV lithography, laser, and other applications 2 : 49th annual meeting of SPIE's international symposium on optical science and technology : Aug 2004, Denver, CO.

(SPIE Proceedings ; 5533)

Call No. (NDL)
M17-05-247
Bibliographic ID of National Diet Library
000007591372
Material type
図書
Author
Khounsary, Ali M.ほか
Publisher
SPIE
Publication date
c2004.
Material Format
Paper
Capacity, size, etc.
ix, 194 p. : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
0819454710
ISSN (series)
0277-786X
Publication, Distribution, etc.
Publication Date
c2004.
Publication Date (W3CDTF)
2004