Beam alignment and image metrology for scanning beam interference lithography fabricating gratings with nanometer phase accuracy

Capacity, size, etc.: 3 microfiches (290 fr.) : negative, ill. ; 11 x 15 cm.

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Material Type: 博士論文
Title: Beam alignment and image metrology for scanning beam interference lithography fabricating gratings with nanometer phase accuracy
Author/Editor: Carl Gang Chen.
Author Heading: Chen, Carl Gang.
Publication, Distribution, etc.: Cambridge : Massachusetts Institute of Technology
Publication Date: 2003.
Extent: 3 microfiches (290 fr.) : negative, ill. ; 11 x 15 cm.
Degree grantor/type: Massachusetts Institute of Technology
Date Granted: 2003.
Date Granted (W3CDTF): 2003
Note (Dissertation): 博士論文
Thesis (doctoral) --Massachusetts Institute of Technology, 2003.
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Note (Bibliography): Includes bibliographies.
Holding library: 国立国会図書館
Call No.: LS-DIMIT-03-056
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007652173
http://id.ndl.go.jp/bib/000007652173
Bibliographic Record Category (NDL): 216