Studies of the thermal oxidation of silicon in the presence of chlorine

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Material Type: 博士論文
Title: Studies of the thermal oxidation of silicon in the presence of chlorine
Author/Editor: 服部毅 [著]
Author Heading: 服部, 毅ハットリ, タケシ
Extent: 冊
Degree grantor/type: 上智大学
Date Granted: 昭和55年4月15日
Date Granted (W3CDTF): 1980
Dissertation Number: 乙第15号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-55-K295
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007654094
http://id.ndl.go.jp/bib/000007654094
Bibliographic Record Category (NDL): 213