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博士論文

High rate deposition of SiC coatings by thermal plasma PVD

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High rate deposition of SiC coatings by thermal plasma PVD

Call No. (NDL)
UT51-2004-S550
Bibliographic ID of National Diet Library
000007702865
Material type
博士論文
Author
王新華 [著]
Publisher
[王新華]
Publication date
[2003]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
東京大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
王新華 [著]
Author Heading
王, 新華 オウ, シンカ
Publication, Distribution, etc.
Publication Date
[2003]
Publication Date (W3CDTF)
2003
Extent
1冊
Alternative Title
熱プラズマPVDによるSiC厚膜の高速堆積 ネツ プラズマ PVD ニ ヨル SiC アツマク ノ コウソク タイセキ
Degree grantor/type
東京大学