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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- ULSI セイゾウヨウ ゼツエンマク エッチング ニ カンスル ケンキュウ
- Author/Editor
- 林久貴 [著]
- Author Heading
- 林, 久貴 ハヤシ, ヒサタカ
- Publication, Distribution, etc.
- Publication Date
- [2003]
- Publication Date (W3CDTF)
- 2003
- Extent
- 1冊
- Degree grantor/type
- 東京大学