High quality diamond film deposition with surface-wave excited low pressure plasma process device

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Material Type: 博士論文
Title: High quality diamond film deposition with surface-wave excited low pressure plasma process device
Author/Editor: Jaeho Kim [著]
Author Heading: 金, 載浩キム, ジェホー
Publication, Distribution, etc.: [Jaeho Kim]
Publication Date: [2004]
Publication Date (W3CDTF): 2004
Extent: 1冊
Alternative Title: 表面波励起低圧力プラズマプロセス装置を用いた高品質ダイヤモンド薄膜生成ヒョウメンハレイキテイアツリョクプラズマプロセスソウチオモチイタコウヒンシツダイヤモンドハクマクセイセイ
Degree grantor/type: 東京大学
Date Granted: 平成16年3月25日
Date Granted (W3CDTF): 2004
Dissertation Number: 甲第19466号
Degree Type: 博士 (科学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
Alias of Author: Kim, Jae-Ho
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2005-B33
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007767069
http://id.ndl.go.jp/bib/000007767069
Bibliographic Record Category (NDL): 213