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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- コウソク イオン ビーム オ モチイタ ジセダイ シュウセキ カイロヨウ ザイリョウ ヒョウカホウ ノ ケンキュウ
- Author/Editor
- 金子哲弥 [著]
- Author Heading
- 金子, 哲弥 カネコ, テツヤ
- Publication, Distribution, etc.
- Publication Date
- [2004]
- Publication Date (W3CDTF)
- 2004
- Extent
- 1冊
- Alternative Title
- Development of analytical system using swift ion beam and its application to characterization of next generation ULSI materials