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博士論文

高速イオンビームを用いた次世代集積回路用材料評価法の研究

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高速イオンビームを用いた次世代集積回路用材料評価法の研究

Call No. (NDL)
UT51-2005-B460
Bibliographic ID of National Diet Library
000007769290
Material type
博士論文
Author
金子哲弥 [著]
Publisher
[金子哲弥]
Publication date
[2004]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
高知工科大学,博士 (工学)
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Paper

Material Type
博士論文
Title Transcription
コウソク イオン ビーム オ モチイタ ジセダイ シュウセキ カイロヨウ ザイリョウ ヒョウカホウ ノ ケンキュウ
Author/Editor
金子哲弥 [著]
Author Heading
金子, 哲弥 カネコ, テツヤ
Publication, Distribution, etc.
Publication Date
[2004]
Publication Date (W3CDTF)
2004
Extent
1冊
Alternative Title
Development of analytical system using swift ion beam and its application to characterization of next generation ULSI materials