Advances in resist technology and processing 22 : 28 February-2 March 2005 : San Jose, California, USA. : Feb 2005, San Jose, CA. (SPIE Proceedings ; 5753)

Advances in resist technology and processing 22 : 28 February-2 March 2005 : San Jose, California, USA. : Feb 2005, San Jose, CA.

(SPIE Proceedings ; 5753)

Call No. (NDL): M17-05-1438
Bibliographic ID of National Diet Library: 000007784801

Material type: 図書

Author: International SEMATECH.

Publisher: SPIE

Publication date: c2005.

Material Format: Paper

Capacity, size, etc.: 2 parts : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN (set): 0819457337 (set)
ISSN (series): 0277-786X
Title: Advances in resist technology and processing 22 : 28 February-2 March 2005 : San Jose, California, USA. : Feb 2005, San Jose, CA.
Series Title: SPIE Proceedings ; 5753
Author Heading: International SEMATECH.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2005.
Publication Date (W3CDTF): 2005
Extent: 2 parts : ill. ; 28 cm.
Place of Publication (Country Code): US
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-05-1438
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007784801
http://id.ndl.go.jp/bib/000007784801
Bibliographic Record Category (NDL): 215