High-speed anisotropic wet etching of silicon and the effects of metal impurities in KOH solution

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Material Type: 博士論文
Title: High-speed anisotropic wet etching of silicon and the effects of metal impurities in KOH solution
Author/Editor: Hiroshi Tanaka [著]
Author Heading: 田中, 浩タナカ, ヒロシ
Publication, Distribution, etc.: [Hiroshi Tanaka]
Publication Date: [2005]
Publication Date (W3CDTF): 2005
Extent: 1冊
Alternative Title: シリコンの高速湿式異方性エッチングの開発ならびにKOH水溶液中金属不純物の効果シリコンノコウソクシッシキイホウセイエッチングノカイハツナラビニ KOH スイヨウエキチュウキンゾクフジュンブツノコウカ
Degree grantor/type: 名古屋大学
Date Granted: 平成17年3月25日
Date Granted (W3CDTF): 2005
Dissertation Number: 甲第6674号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2005-D869
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007826853
http://id.ndl.go.jp/bib/000007826853
Bibliographic Record Category (NDL): 213