プラズマ化学気相成長法により堆積したas-grownシリコン酸窒化薄膜の膜中欠陥に関する研究

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Material Type: 博士論文
Title: プラズマ化学気相成長法により堆積したas-grownシリコン酸窒化薄膜の膜中欠陥に関する研究
Title Transcription: プラズマカガクキソウセイチョウホウニヨリタイセキシタ as - grown シリコンサンチッカハクマクノマクチュウケッカンニカンスルケンキュウ
Author/Editor: 二ツ寺政友 [著]
Author Heading: 二ツ寺, 政友フタツデラ, マサトモ
Publication, Distribution, etc.: [二ツ寺政友]
Publication Date: [2005]
Publication Date (W3CDTF): 2005
Extent: 1冊
Degree grantor/type: 金沢大学
Date Granted: 平成17年3月22日
Date Granted (W3CDTF): 2005
Dissertation Number: 甲第2474号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2005-K155
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007969154
http://id.ndl.go.jp/bib/000007969154
Bibliographic Record Category (NDL): 213