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博士論文

The chemical dynamics of XeF2 and Xe(F2) reactions with Si(100)

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The chemical dynamics of XeF2 and Xe(F2) reactions with Si(100)

Call No. (NDL)
M-DIMIT-04-293
Bibliographic ID of National Diet Library
000008057966
Material type
博士論文
Author
Robert Charles Hefty.
Publisher
Massachusetts Institute of Technology
Publication date
2003.
Material Format
Paper
Capacity, size, etc.
420 p.
Name of awarding university/degree
Massachusetts Institute of Technology
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Paper

Material Type
博士論文
Author/Editor
Robert Charles Hefty.
Publication Date
2003.
Extent
420 p.
Degree grantor/type
Massachusetts Institute of Technology
Date Granted
2004.
Date Granted (W3CDTF)
2004