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Device and process technologies for microelectronics, MEMS, and photonics 4 : 12-14 December 2005 : Brisbane, Australia. : SPIE international symposium on microelectronics, MEMS, and nanotechnology : Dec 2005, Brisbane, Australia. (SPIE Proceedings ; 6037)

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Device and process technologies for microelectronics, MEMS, and photonics 4 : 12-14 December 2005 : Brisbane, Australia. : SPIE international symposium on microelectronics, MEMS, and nanotechnology : Dec 2005, Brisbane, Australia.

(SPIE Proceedings ; 6037)

Call No. (NDL)
M17-06-1095
Bibliographic ID of National Diet Library
000008163583
Material type
図書
Author
University of Adelaide.ほか
Publisher
SPIE
Publication date
c2006.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 28 cm.
NDC
-
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Notes on use

Note (General)：

Papers.Errata sheets inserted."This conference, Device and Process Technologies for Microelectronics, MEMS, and Photonics, (...) " -- introd.

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Paper

Material Type
図書
ISBN
0819460680
ISSN (series)
0277-786X
Title
Device and process technologies for microelectronics, MEMS, and photonics 4 : 12-14 December 2005 : Brisbane, Australia. : SPIE international symposium on microelectronics, MEMS, and nanotechnology : Dec 2005, Brisbane, Australia.
Series Title
SPIE Proceedings ; 6037
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6037.
Author Heading
University of Adelaide.
Chiao, Jung-Chih.
Centre for Biomedical Engineering, Adelaide.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2006.
Publication Date (W3CDTF)
2006