Scientific wet process technology for innovative LSI/FPD manufacturing / edited by Tadahiro Ohmi.

• Material Type: 図書
• ISBN: 9780849335433 (ISBN-13); 0849335434 (ISBN-10 : alk. paper)
• Title: Scientific wet process technology for innovative LSI/FPD manufacturing / edited by Tadahiro Ohmi.
• Author Heading: 大見, 忠弘, 1939- オオミ, タダヒロ, 1939- ( 00406390 )Authorities
• Publication, Distribution, etc.: Boca Raton, FL : CRC/Taylor & Francis
• Publication Date: 2006.
• Publication Date (W3CDTF): 2006
• Extent: 386 p. : ill. ; 27 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductors -- Design and construction.; Semiconductors -- Cleaning.; Integrated circuits -- Design and construction.
• LCC: TK7871.85
• DDC: 621.3815/2
• NDLC: ND371
• Note (General): Related URL: Table of contents only http: //www.loc.gov/catdir/toc/ecip0518/2005024414.html.; Related URL: Publisher description http: //www.loc.gov/catdir/enhancements/fy0648/2005024414-d.html.
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND371-B18
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000008220175; http://id.ndl.go.jp/bib/000008220175
• LC Control Number: 2005024414; https://lccn.loc.gov/2005024414
• RLIN No.: DCLC2005024414-B
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211