Pulse-driven cylindrical magnetron sputtering for low-temperature and high-throughput deposition

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Material Type: 博士論文
Title: Pulse-driven cylindrical magnetron sputtering for low-temperature and high-throughput deposition
Author/Editor: Cheng Shih Wang [著]
Author Heading: 汪, 正時ワン, チャンシン
Publication, Distribution, etc.: [Cheng Shih Wang]
Publication Date: [2006]
Publication Date (W3CDTF): 2006
Extent: 1冊
Alternative Title: 低温、高スループット化を目指したパルス駆動円筒マグネトロンスパッタ技術テイオンコウスループットカオメザシタパルスクドウエントウマグネトロンスパッタギジュツ
Degree grantor/type: 金沢大学
Date Granted: 平成18年3月22日
Date Granted (W3CDTF): 2006
Dissertation Number: 甲第2656号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
Alias of Author: Wang, Cheng Shih
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2006-N506
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008384900
http://id.ndl.go.jp/bib/000008384900
Bibliographic Record Category (NDL): 213