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博士論文

MEMS型多軸物理量センサに関する研究

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MEMS型多軸物理量センサに関する研究

Call No. (NDL)
UT51-2006-P850
Bibliographic ID of National Diet Library
000008424275
Material type
博士論文
Author
渡部善幸 [著]
Publisher
[渡部善幸]
Publication date
[2005]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士 (工学)
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Paper

Material Type
博士論文
Title Transcription
MEMSガタ タジク ブツリリョウ センサ ニ カンスル ケンキュウ
Author/Editor
渡部善幸 [著]
Author Heading
渡部, 善幸 ワタナベ, ヨシユキ
Publication, Distribution, etc.
Publication Date
[2005]
Publication Date (W3CDTF)
2005
Extent
1冊
Alternative Title
A study on multi-axis physical sensors by using MEMS technology