Study on Z-pinch plasma light source for EUV lithography

Study on Z-pinch plasma light source for EUV lithography

Call No. (NDL): UT51-2006-R301
Bibliographic ID of National Diet Library: 000008443247

Material type: 博士論文

Author: Inho Song [著]

Publisher: [Inho Song]

Publication date: 2005

Material Format: Paper

Capacity, size, etc.: 1冊

Name of awarding university/degree: 東京工業大学,博士 (工学)

Notes on use

Note (General)：: 博士論文

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Paper

Material Type: 博士論文
Title: Study on Z-pinch plasma light source for EUV lithography
Author/Editor: Inho Song [著]
Author Heading: 宋, 仁皓ソン, インホー
Publication, Distribution, etc.: [Inho Song]
Publication Date: 2005
Publication Date (W3CDTF): 2005
Extent: 1冊
Degree grantor/type: 東京工業大学
Date Granted: 平成17年12月31日
Date Granted (W3CDTF): 2005
Dissertation Number: 甲第6307号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
Alias of Author: Song, Inho
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2006-R301
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008443247
http://id.ndl.go.jp/bib/000008443247
Bibliographic Record Category (NDL): 213