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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- イオン ビーム ユウキ CVDホウ ニ ヨル チョウビリュウシ ノ サクセイ ト ソノ ジセイ
- Author/Editor
- 鈴木孝雄, 豊田工業大学 [著]
- Publication, Distribution, etc.
- Publication Date
- 2002-20042005.3
- Publication Date (W3CDTF)
- 20022004
- Extent
- 205p
- Additional Title
- 研究種目 基盤研究(A)