博士論文

Si基板上へのRF-MBE法を用いたAlN,GaNのヘテロエピタキシー

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Si基板上へのRF-MBE法を用いたAlN,GaNのヘテロエピタキシー

Call No. (NDL)
UT51-2006-U703
Bibliographic ID of National Diet Library
000008474383
Material type
博士論文
Author
菊池友 [著]
Publisher
[菊池友]
Publication date
2006
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
同志社大学,博士 (工学)
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Paper

Material Type
博士論文
Title Transcription
Si キバンジョウ エ ノ RF - MBEホウ オ モチイタ AlN GaN ノ ヘテロエピタキシー
Author/Editor
菊池友 [著]
Author Heading
菊池, 友 キクチ, トモ
Publication, Distribution, etc.
Publication Date
2006
Publication Date (W3CDTF)
2006
Extent
1冊
Alternative Title
Heteroepitaxial growth of AlN and GaN on Si substates using RF-MBE