A study on functionality characterization of thin-film resist and relating materials for emerging lithography

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Material Type: 博士論文
Title: A study on functionality characterization of thin-film resist and relating materials for emerging lithography
Author/Editor: Mitsuru Sato [著]
Author Heading: 佐藤, 充サトウ, ミツル
Publication, Distribution, etc.: [Mitsuru Sato]
Publication Date: 2006
Publication Date (W3CDTF): 2006
Extent: 1冊
Alternative Title: 先端リソグラフィにおける薄膜レジスト及び関連材料の機能性評価に関する研究センタンリソグラフィニオケルハクマクレジストオヨビカンレンザイリョウノキノウセイヒョウカニカンスルケンキュウ
Degree grantor/type: 長岡技術科学大学
Date Granted: 平成18年8月31日
Date Granted (W3CDTF): 2006
Dissertation Number: 甲第387号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2006-U698
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008474483
http://id.ndl.go.jp/bib/000008474483
Bibliographic Record Category (NDL): 213