Study on silicon thermoresistive fluidic inertial sensors utilizing microelectromechanical systems (MEMS) technology

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Material Type: 博士論文
Title: Study on silicon thermoresistive fluidic inertial sensors utilizing microelectromechanical systems (MEMS) technology
Author/Editor: Dau Thanh Van [著]
Author Heading: Dau Thanh Van ダウタンバン
Publication, Distribution, etc.: [Dau Thanh Van]
Publication Date: [2007]
Publication Date (W3CDTF): 2007
Extent: 1冊
Alternative Title: MEMS技術を用いたシリコン熱抵抗型流体慣性センサに関する研究 MEMS ギジュツオモチイタシリコンネツテイコウガタリュウタイカンセイセンサニカンスルケンキュウ
Degree grantor/type: 立命館大学
Date Granted: 平成19年3月31日
Date Granted (W3CDTF): 2007
Dissertation Number: 甲第458号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2007-C874
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008525585
http://id.ndl.go.jp/bib/000008525585
Bibliographic Record Category (NDL): 213