Micromachining technology for micro-optics and nano-optics 5 and microfabrication process technology 12 : 22-24 January 2007 : San Jose, California, USA. : Jan 2007, San Jose, CA.

• Material Type: 図書
• ISBN: 9780819465757
• ISSN (series): 0277-786X
• Title: Micromachining technology for micro-optics and nano-optics 5 and microfabrication process technology 12 : 22-24 January 2007 : San Jose, California, USA. : Jan 2007, San Jose, CA.
• Series Title: SPIE Proceedings ; 6462
• Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6462.
• Author Heading: Perez-Maher, Mary Ann.
• Publication, Distribution, etc.: Bellingham : SPIE
• Publication Date: c2007.
• Publication Date (W3CDTF): 2007
• Extent: 1 v. (various pagings) : ill. ; 28 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Integrated optics -- Congresses.; Miniature electronic equipment -- Design and construction -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.; Micromachining -- Congresses.; Microelectromechanical systems -- Congresses.; Microfabrication -- Congresses.
• NDLC: M17
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-07-1037
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000008533142; http://id.ndl.go.jp/bib/000008533142
• OCLC No.: 123347438; https://www.worldcat.org/oclc/123347438
• Bibliographic Record Category (NDL): 215