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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- スイソ フンイキ アニール ニ ヨル シリコン トレンチ ノ コウゾウ セイギョ
- Author/Editor
- 栗林均 [著]
- Author Heading
- 栗林, 均 クリバヤシ, ヒトシ
- Publication, Distribution, etc.
- Publication Date
- [2007]
- Publication Date (W3CDTF)
- 2007
- Extent
- 1冊
- Degree grantor/type
- 大阪大学