A theoretical study of oxidation and nitridation on silicon surfaces

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Material Type: 博士論文
Title: A theoretical study of oxidation and nitridation on silicon surfaces
Author/Editor: Kenji Imamura [著]
Author Heading: 今村, 賢司イマムラ, ケンジ
Publication, Distribution, etc.: [Kenji Imamura]
Publication Date: [2007]
Publication Date (W3CDTF): 2007
Extent: 5冊 (副論文・参考論文とも)
Alternative Title: シリコン表面上における酸化および窒化に関する理論的研究シリコンヒョウメンジョウニオケルサンカオヨビチッカニカンスルリロンテキケンキュウ
Degree grantor/type: 立教大学
Date Granted: 平成19年3月31日
Date Granted (W3CDTF): 2007
Dissertation Number: 甲第192号
Degree Type: 博士 (理学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2007-E976
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008557116
http://id.ndl.go.jp/bib/000008557116
Bibliographic Record Category (NDL): 213