Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith. 2nd ed. (Optical science and engineering ; 126)

Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.

2nd ed.

(Optical science and engineering ; 126)

Call No. (NDL): ND371-B24
Bibliographic ID of National Diet Library: 000008575904

Material type: 図書

Author: Suzuki, Kazuaki. [鈴木一明]ほか

Publisher: CRC Press

Publication date: c2007.

Material Format: Paper

Capacity, size, etc.: 848 p. : ill. ; 27 cm.

NDC: -

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Note (General)：: Related URL: Table of contents only http: //www.loc.gov/catdir/toc/ecip071/2006031516.html.Related URL: Publisher description http: //www.loc.gov/catd...

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Paper

Material Type: 図書
ISBN: 9780824790240 (alk. paper)
0824790243 (alk. paper)
Title: Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.
Edition: 2nd ed.
Series Title: Optical science and engineering ; 126
Title Heading: Optical science and engineering (Boca Raton, Fla.) ; 126.
Author Heading: Suzuki, Kazuaki. [鈴木一明]
Smith, Bruce W., 1959-
Publication, Distribution, etc.: Boca Raton : CRC Press
Publication Date: c2007.
Publication Date (W3CDTF): 2007
Extent: 848 p. : ill. ; 27 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microlithography -- Industrial applications.
Integrated circuits -- Masks.
Metal oxide semiconductors, Complementary -- Design and construction.
Manufacturing processes.
LCC: TK7836
DDC: 621.3815/31
NDLC: ND371
Note (General): Related URL: Table of contents only http: //www.loc.gov/catdir/toc/ecip071/2006031516.html.
Related URL: Publisher description http: //www.loc.gov/catdir/enhancements/fy0701/2006031516-d.html.
Note (Bibliography): Includes bibliographical references and index.
Holding library: 国立国会図書館
Call No.: ND371-B24
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000008575904
http://id.ndl.go.jp/bib/000008575904
LC Control Number: 2006031516
https://lccn.loc.gov/2006031516
OCLC No.: 71581976
https://www.worldcat.org/oclc/71581976
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 211