図書

Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith. 2nd ed. (Optical science and engineering ; 126)

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Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.

2nd ed.

(Optical science and engineering ; 126)

Call No. (NDL)
ND371-B24
Bibliographic ID of National Diet Library
000008575904
Material type
図書
Author
Suzuki, Kazuaki. [鈴木一明]ほか
Publisher
CRC Press
Publication date
c2007.
Material Format
Paper
Capacity, size, etc.
848 p. : ill. ; 27 cm.
NDC
-
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Related URL: Table of contents only http: //www.loc.gov/catdir/toc/ecip071/2006031516.html.Related URL: Publisher description http: //www.loc.gov/catd...

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Paper

Material Type
図書
ISBN
9780824790240 (alk. paper)
0824790243 (alk. paper)
Edition
2nd ed.
Publication, Distribution, etc.
Publication Date
c2007.
Publication Date (W3CDTF)
2007