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図書

2006 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : 22-24 May 2006 : Boston MA. : ASMC 2006 : 17th annual IEEE/SEMI advanced semiconductor manufacturing conference : May 2006, Boston, MA.

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2006 IEEE/SEMI advanced semiconductor manufacturing conference and workshop : 22-24 May 2006 : Boston MA. : ASMC 2006 : 17th annual IEEE/SEMI advanced semiconductor manufacturing conference : May 2006, Boston, MA.

Call No. (NDL)
M17-07-1511
Bibliographic ID of National Diet Library
000008580766
Material type
図書
Author
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (17th : 2006 : Boston, Mass.)
Publisher
IEEE
Publication date
c2006.
Material Format
Paper
Capacity, size, etc.
xiii, 448, 3 p. : ill. ; 28 cm.
NDC
-
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Notes on use

Note (General):

Papers.IEEE cat no 06CH37782.

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Paper

Material Type
図書
ISBN
1424402549
ISSN
1078-8743
Publication, Distribution, etc.
Publication Date
c2006.
Publication Date (W3CDTF)
2006
Extent
xiii, 448, 3 p. : ill. ; 28 cm.
Place of Publication (Country Code)
US