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博士論文

Investigation on dielectric Ta2O5 and ferroelectric SrBi2Ta2O9 thin films, and fundamental aspect of chemical vapor deposition

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Investigation on dielectric Ta2O5 and ferroelectric SrBi2Ta2O9 thin films, and fundamental aspect of chemical vapor deposition

Call No. (NDL)
UT51-2007-F877
Bibliographic ID of National Diet Library
000008589940
Material type
博士論文
Author
Chiharu Isobe [著]
Publisher
[Chiharu Isobe]
Publication date
[2005]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
山形大学,博士 (工学)
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Paper

Material Type
博士論文
Author/Editor
Chiharu Isobe [著]
Author Heading
磯辺, 千春 イソベ, チハル
Publication, Distribution, etc.
Publication Date
[2005]
Publication Date (W3CDTF)
2005
Extent
1冊
Alternative Title
誘電体Ta2O5薄膜と強誘電体SrBi2Ta2O9薄膜の研究,ならびに,化学的気相成長法における基礎過程の研究 ユウデンタイ Ta2O5 ハクマク ト キョウユウデンタイ SrBi2Ta2O9 ハクマク ノ ケンキュウ ナラビニ カガクテキ キソウ セイチョウホウ ニ オケル キソ カテイ ノ ケンキュウ
Degree grantor/type
山形大学