高速/低電力ULSIのための低誘電率材料・プロセスの研究

Notes on use

Search by Bookstore

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 博士論文
Title: 高速/低電力ULSIのための低誘電率材料・プロセスの研究
Title Transcription: コウソクテイデンリョク ULSI ノタメノテイユウデンリツザイリョウプロセスノケンキュウ
Author/Editor: 古澤健志 [著]
Author Heading: 古澤, 健志フルサワ, タケシ
Publication, Distribution, etc.: [古澤健志]
Publication Date: [2007]
Publication Date (W3CDTF): 2007
Extent: 1冊
Alternative Title: Materials and integration study on low dielectric constant insulators for high-speed/low-power ULSIs
Degree grantor/type: 早稲田大学
Date Granted: 平成19年3月1日
Date Granted (W3CDTF): 2007
Dissertation Number: 乙第2080号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2007-L259
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009042162
http://id.ndl.go.jp/bib/000009042162
Bibliographic Record Category (NDL): 213