26th annual SPWCC conference : 2007 proceedings : February 13-14, 2007 : Santa Clara Convention Center : Santa Clara, CA. : Feb 2007, Santa Clara, CA.

• Material Type: 図書
• Title: 26th annual SPWCC conference : 2007 proceedings : February 13-14, 2007 : Santa Clara Convention Center : Santa Clara, CA. : Feb 2007, Santa Clara, CA.
• Author Heading: Balazs, Marjorie K.; Semiconductor Pure Water and Chemicals Conference (26th : 2007 : Santa Clara, Calif.)
• Publication, Distribution, etc.: Los Altos : Semiconductor Pure Water and Chemicals Conference
• Publication Date: [c2007]
• Publication Date (W3CDTF): 2007
• Extent: vi, 258 p. : ill. ; 28 cm.
• Accompanying material: With a CD-ROM.
• Alternative Title: 26th annual semiconductor pure water and chemicals conference : 2007 proceedings : February 13-14, 2007 : Santa Clara Convention Center : Santa Clara, California, USA; 2007 SPWCC proceedings
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductors -- Congresses.; Water -- Purification -- Congresses.
• NDLC: M17
• Note (General): Papers.; "Wet Processes Conference : Presentations" -- CD-ROM.
• Note (Bibliography): Includes bibliographical references.
• Holding library: 国立国会図書館
• Call No.: M17-07-2921
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000009152026; http://id.ndl.go.jp/bib/000009152026
• OCLC No.: 173174076; https://www.worldcat.org/oclc/173174076
• Bibliographic Record Category (NDL): 215