博士論文

Study on micro transportation systems based on electrostatic actuators utilizing micro electro mechanical systems (MEMS) technology

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Study on micro transportation systems based on electrostatic actuators utilizing micro electro mechanical systems (MEMS) technology

Call No. (NDL)
UT51-2007-R543
Bibliographic ID of National Diet Library
000009173078
Material type
博士論文
Author
Pham Hong Phuc [著]
Publisher
[Pham Hong Phuc]
Publication date
[2007]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
立命館大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Pham Hong Phuc [著]
Author Heading
Pham Hong Phuc ファム ホン フック
Publication, Distribution, etc.
Publication Date
[2007]
Publication Date (W3CDTF)
2007
Extent
1冊
Alternative Title
MEMS技術を用いた静電アクチュエータに基づくマイクロ搬送システムに関する研究 MEMS ギジュツ オ モチイタ セイデン アクチュエータ ニ モトズク マイクロ ハンソウ システム ニ カンスル ケンキュウ
Degree grantor/type
立命館大学