Cleaning and surface conditioning technology in semiconductor device manufacturing 10. : 10th international symposium on semiconductor cleaning and surface conditioning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2007, Washington, DC. (ECS Transactions ; 11 (no. 2))

Cleaning and surface conditioning technology in semiconductor device manufacturing 10. : 10th international symposium on semiconductor cleaning and surface conditioning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2007, Washington, DC.

(ECS Transactions ; 11 (no. 2))

Call No. (NDL): M17-08-543
Bibliographic ID of National Diet Library: 000009248564

Material type: 図書

Author: -

Publisher: Electrochemical Society

Publication date: c2007.

Material Format: Paper

Capacity, size, etc.: xi, 481 p. : ill. ; 23 cm.

NDC: -

View All

Notes on use

Note (General)：: Papers."This series of symposia was (...) the 'ECS Cleaning Symposium' has become a biannual event of great interest to (...) " -- pref.

Accompanying material：: With a CD-ROM.

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
ISBN: 9781566775687
9781566775809 (CD-ROM)
ISSN: 1938-6737 (online)
ISSN (series): 1938-5862 (print)
Title: Cleaning and surface conditioning technology in semiconductor device manufacturing 10. : 10th international symposium on semiconductor cleaning and surface conditioning technology in semiconductor device manufacturing : fall meeting of the Electrochemical Society : ECS cleaning symposium : Oct 2007, Washington, DC.
Series Title: ECS Transactions ; 11 (no. 2)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2007.
Publication Date (W3CDTF): 2007
Extent: xi, 481 p. : ill. ; 23 cm.
Accompanying material: With a CD-ROM.
Alternative Title: Dielectric and semiconductor materials, devices, and processing
Title of CD-ROM: Cleaning technology in semiconductor device manufacturing 1989-2007 : proceedings from the ECS semiconductor cleaning symposia 1-10
Place of Publication (Country Code): US
NDLC: M17
Note (General): Papers.
"This series of symposia was (...) the 'ECS Cleaning Symposium' has become a biannual event of great interest to (...) " -- pref.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-08-543
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009248564
http://id.ndl.go.jp/bib/000009248564
Bibliographic Record Category (NDL): 215