Ultra clean processing of semiconductor surfaces 8 : UCPSS 2006 : selected, peer reviewed papers from the 8th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) : held in Antwerp, Belgium, September 18-20, 2006. : Sep 2006, Antwerp, Belgium. (Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 134)

Ultra clean processing of semiconductor surfaces 8 : UCPSS 2006 : selected, peer reviewed papers from the 8th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) : held in Antwerp, Belgium, September 18-20, 2006. : Sep 2006, Antwerp, Belgium.

(Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 134)

Call No. (NDL): M17-08-566
Bibliographic ID of National Diet Library: 000009256656

Material type: 図書

Author: Interuniversity Micro-Electronics Center.ほか

Publisher: Trans Tech Publications

Publication date: c2008.

Material Format: Paper

Capacity, size, etc.: xiv, 390 p. : ill. ; 25 cm.

NDC: -

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Notes on use

Note (General)：: Selected papers." (...) (UCPSS) is a bi-annual conference organized by IMEC."-- pref.

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Paper

Material Type: 図書
ISSN (series): 0377-6883.
Title: Ultra clean processing of semiconductor surfaces 8 : UCPSS 2006 : selected, peer reviewed papers from the 8th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) : held in Antwerp, Belgium, September 18-20, 2006. : Sep 2006, Antwerp, Belgium.
Series Title: Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 134
Author Heading: Interuniversity Micro-Electronics Center.
Mertens, Paul.
Meuris, Marc.
Heyns, Marc.
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (8th : 2006 : Antwerp, Belgium)
Publication, Distribution, etc.: Stafa-Zurich : Trans Tech Publications
United Kingdom : Trans Tech Publications
Publication Date: c2008.
Publication Date (W3CDTF): 2008
Extent: xiv, 390 p. : ill. ; 25 cm.
Place of Publication (Country Code): CH
Text Language Code: eng
Subject Heading: Semiconductors -- Surfaces -- Congresses.
Ultra clean processing.
Semiconductor surfaces.
Silicon surfaces.
UCPSS.
DDC: 537.622
NDLC: M17
Note (General): Selected papers.
" (...) (UCPSS) is a bi-annual conference organized by IMEC."-- pref.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-08-566
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009256656
http://id.ndl.go.jp/bib/000009256656
OCLC No.: 191242317
https://www.worldcat.org/oclc/191242317
Bibliographic Record Category (NDL): 215