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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- コウカガク ハンノウ オ オウヨウシタ ジセダイ ハンドウタイ キバン ノ チョウセイミツ カコウ ニ カンスル ケンキュウ
- Author/Editor
- 洪錫亨 [著]
- Author Heading
- 洪, 錫亨 ホン, ソクヒョン
- Publication, Distribution, etc.
- Publication Date
- [2007]
- Publication Date (W3CDTF)
- 2007
- Extent
- 1冊
- Alternative Title
- Research on superprecision polishing of the next generation semiconductor substrate applied by photochemical reaction