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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- マイクロマシニング ニ ヨル コウシュウハ MEMS デバイス
- Author/Editor
- 江刺正喜, 東北大学 [著]
- Author Heading
- 江刺, 正喜, 1949- エサシ, マサヨシ, 1949- ( 00154561 )Authorities東北大学 トウホク ダイガク ( 00305371 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 2004-20062007.3
- Publication Date (W3CDTF)
- 20042006
- Extent
- 1冊
- Additional Title
- 研究種目 基盤研究(A)