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Bibliographic Record
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- Material Type
- 博士論文
- Title
- Title Transcription
- 3ジゲン ビサイ コウゾウタイ ノ ソウセイ カコウ ニ カンスル ケンキュウ
- Author/Editor
- 佐藤健夫 [著]
- Author Heading
- 佐藤, 健夫 サトウ, タケオ
- Publication, Distribution, etc.
- Publication Date
- [2007]
- Publication Date (W3CDTF)
- 2007
- Extent
- 1冊
- Alternative Title
- Research on fabrication techniques for 3 dimensional micro mechanical structures