Low temperature growth of carbon nanotubes by remote-plasma CVD and their application to LSI interconnection

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Material Type: 博士論文
Title: Low temperature growth of carbon nanotubes by remote-plasma CVD and their application to LSI interconnection
Author/Editor: Takayuki Iwasaki [著]
Author Heading: 岩崎, 孝之イワサキ, タカユキ
Publication, Distribution, etc.: [Takayuki Iwasaki]
Publication Date: [2008]
Publication Date (W3CDTF): 2008
Extent: 1冊
Alternative Title: リモートプラズマCVDによるカーボンナノチューブの低温合成およびLSI配線応用に関する研究リモートプラズマ CVD ニヨルカーボンナノチューブノテイオンゴウセイオヨビ LSI ハイセンオウヨウニカンスルケンキュウ
Degree grantor/type: 早稲田大学
Date Granted: 平成20年3月15日
Date Granted (W3CDTF): 2008
Dissertation Number: 甲第2623号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2008-B898
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009364824
http://id.ndl.go.jp/bib/000009364824
Bibliographic Record Category (NDL): 213