Digest of papers : microprocesses and nanotechnology 2005 : 2005 international microprocesses and nanotechnology conference : October 25-28, 2005, conference : (October 25 technical seminar, 26-28 conference) : Hotel Bellclassic Tokyo, Japan. : MNC 2005 : symposium A: technical challenges in lithography for 45nm and below : symposium B: nano-organization: synthesis, processing and functionality : Oct 2005, Tokyo, Japan.

Digest of papers : microprocesses and nanotechnology 2005 : 2005 international microprocesses and nanotechnology conference : October 25-28, 2005, conference : (October 25 technical seminar, 26-28 conference) : Hotel Bellclassic Tokyo, Japan. : MNC 2005 : symposium A: technical challenges in lithography for 45nm and below : symposium B: nano-organization: synthesis, processing and functionality : Oct 2005, Tokyo, Japan.

Call No. (NDL): M17-08-1331
Bibliographic ID of National Diet Library: 000009391017

Material type: 図書

Author: International Microprocesses and Nanotechnology Conference (2005 : Tokyo, Japan)

Publisher: Japan Society of Applied Physics

Publication date: c2005.

Material Format: Paper

Capacity, size, etc.: xxiii, 295 p. : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Program, abstracts and papers.IEEE cat no 05EX1180.

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Paper

Material Type: 図書
ISBN: 4990247221
Title: Digest of papers : microprocesses and nanotechnology 2005 : 2005 international microprocesses and nanotechnology conference : October 25-28, 2005, conference : (October 25 technical seminar, 26-28 conference) : Hotel Bellclassic Tokyo, Japan. : MNC 2005 : symposium A: technical challenges in lithography for 45nm and below : symposium B: nano-organization: synthesis, processing and functionality : Oct 2005, Tokyo, Japan.
Author Heading: International Microprocesses and Nanotechnology Conference (2005 : Tokyo, Japan)
Publication, Distribution, etc.: Tokyo : Japan Society of Applied Physics
Publication Date: c2005.
Publication Date (W3CDTF): 2005
Extent: xxiii, 295 p. : ill. ; 28 cm.
Alternative Title: Microprocesses and nanotechnology 2005 : Tokyo, Japan : 26-28 October 2005
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: Microfabrication -- Congresses.
Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.
Lithography -- Congresses.
Nanotechnology -- Congresses.
Microelectronics -- Congresses.
NDLC: M17
Note (General): Program, abstracts and papers.
IEEE cat no 05EX1180.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-08-1331
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009391017
http://id.ndl.go.jp/bib/000009391017
LC Control Number: 2006278941
https://lccn.loc.gov/2006278941
OCLC No.: 71275712
https://www.worldcat.org/oclc/71275712
Bibliographic Record Category (NDL): 215