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図書

Micromachining and microfabrication process technology 13 : 22-23 January 2008 : San Jose, California, USA. : Jan 2008, San Jose, CA. (SPIE Proceedings ; 6882)

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Micromachining and microfabrication process technology 13 : 22-23 January 2008 : San Jose, California, USA. : Jan 2008, San Jose, CA.

(SPIE Proceedings ; 6882)

Call No. (NDL)
M17-08-1447
Bibliographic ID of National Diet Library
000009394885
Material type
図書
Author
Perez-Maher, Mary Ann.ほか
Publisher
SPIE
Publication date
c2008.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
9780819470577
ISSN (series)
0277-786X
Title
Micromachining and microfabrication process technology 13 : 22-23 January 2008 : San Jose, California, USA. : Jan 2008, San Jose, CA.
Series Title
SPIE Proceedings ; 6882
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6882.
Author Heading
Perez-Maher, Mary Ann.
Chiao, Jung-Chih.
Resnick, Paul J.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2008.
Publication Date (W3CDTF)
2008