Reliability, packaging, testing, and characterization of MEMS/MOEMS 7 : 21-22 January 2008 : San Jose, California, USA. : international reliability conference : 7th conference on reliability, packaging, testing, and characterization of MEMS/MOEMS : photonics west 2008 meeting : MOEMS-MEMS 2008 micro-nano fabrication symposium : Jan 2008, San Jose, CA. (SPIE Proceedings ; 6884)

Reliability, packaging, testing, and characterization of MEMS/MOEMS 7 : 21-22 January 2008 : San Jose, California, USA. : international reliability conference : 7th conference on reliability, packaging, testing, and characterization of MEMS/MOEMS : photonics west 2008 meeting : MOEMS-MEMS 2008 micro-nano fabrication symposium : Jan 2008, San Jose, CA.

(SPIE Proceedings ; 6884)

Call No. (NDL): M17-08-1453
Bibliographic ID of National Diet Library: 000009394911

Material type: 図書

Author: Hartzell, Allyson L.ほか

Publisher: SPIE

Publication date: c2008.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers."The conference was a part of the MOEMS-MEMS 2008 Micro-Nano Fabrication symposium (...) and was held 20-25 January 2008 (...) " -- introd.

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Paper

Material Type: 図書
ISBN: 9780819470591
ISSN (series): 0277-786X
Title: Reliability, packaging, testing, and characterization of MEMS/MOEMS 7 : 21-22 January 2008 : San Jose, California, USA. : international reliability conference : 7th conference on reliability, packaging, testing, and characterization of MEMS/MOEMS : photonics west 2008 meeting : MOEMS-MEMS 2008 micro-nano fabrication symposium : Jan 2008, San Jose, CA.
Series Title: SPIE Proceedings ; 6884
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6884.
Author Heading: Hartzell, Allyson L.
Ramesham, Rajeshuni.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2008.
Publication Date (W3CDTF): 2008
Extent: 1 v. (various pagings) : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectromechanical systems -- Reliability -- Congresses.
Microelectromechanical systems -- Testing -- Congresses.
Microelectronic packaging -- Congresses.
NDLC: M17
Note (General): Papers.
"The conference was a part of the MOEMS-MEMS 2008 Micro-Nano Fabrication symposium (...) and was held 20-25 January 2008 (...) " -- introd.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-08-1453
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009394911
http://id.ndl.go.jp/bib/000009394911
OCLC No.: 229155464
https://www.worldcat.org/oclc/229155464
Bibliographic Record Category (NDL): 215