図書

Reliability, packaging, testing, and characterization of MEMS/MOEMS 7 : 21-22 January 2008 : San Jose, California, USA. : international reliability conference : 7th conference on reliability, packaging, testing, and characterization of MEMS/MOEMS : photonics west 2008 meeting : MOEMS-MEMS 2008 micro-nano fabrication symposium : Jan 2008, San Jose, CA. (SPIE Proceedings ; 6884)

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Reliability, packaging, testing, and characterization of MEMS/MOEMS 7 : 21-22 January 2008 : San Jose, California, USA. : international reliability conference : 7th conference on reliability, packaging, testing, and characterization of MEMS/MOEMS : photonics west 2008 meeting : MOEMS-MEMS 2008 micro-nano fabrication symposium : Jan 2008, San Jose, CA.

(SPIE Proceedings ; 6884)

Call No. (NDL)
M17-08-1453
Bibliographic ID of National Diet Library
000009394911
Material type
図書
Author
Hartzell, Allyson L.ほか
Publisher
SPIE
Publication date
c2008.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 28 cm.
NDC
-
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Notes on use

Note (General)：

Papers."The conference was a part of the MOEMS-MEMS 2008 Micro-Nano Fabrication symposium (...) and was held 20-25 January 2008 (...) " -- introd.

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Paper

Material Type
図書
ISBN
9780819470591
ISSN (series)
0277-786X
Title
Reliability, packaging, testing, and characterization of MEMS/MOEMS 7 : 21-22 January 2008 : San Jose, California, USA. : international reliability conference : 7th conference on reliability, packaging, testing, and characterization of MEMS/MOEMS : photonics west 2008 meeting : MOEMS-MEMS 2008 micro-nano fabrication symposium : Jan 2008, San Jose, CA.
Series Title
SPIE Proceedings ; 6884
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6884.
Author Heading
Hartzell, Allyson L.
Ramesham, Rajeshuni.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2008.
Publication Date (W3CDTF)
2008