Characterization of semiconductor devices and thin dielectric films by scanning capacitance microscopy with self-sensing conductive probe

Call No. (NDL): UT51-2008-D437
Bibliographic ID of National Diet Library: 000009403055

Material type: 博士論文

Author: Yuichi Naitou [著]

Publisher: [Yuichi Naitou]

Publication date: [2008]

Material Format: Paper

Capacity, size, etc.: 1冊

Name of awarding university/degree: 大阪大学,博士 (工学)

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Note (General)：: 博士論文

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Paper

Material Type: 博士論文
Title: Characterization of semiconductor devices and thin dielectric films by scanning capacitance microscopy with self-sensing conductive probe
Author/Editor: Yuichi Naitou [著]
Author Heading: 内藤, 裕一ナイトウ, ユウイチ
Publication, Distribution, etc.: [Yuichi Naitou]
Publication Date: [2008]
Publication Date (W3CDTF): 2008
Extent: 1冊
Alternative Title: 自己検出型導電性プローブを用いた走査型容量顕微鏡による半導体デバイスおよび薄膜誘電体材料の局所電気特性評価に関する研究ジコケンシュツガタドウデンセイプローブオモチイタソウサガタヨウリョウケンビキョウニヨルハンドウタイデバイスオヨビハクマクユウデンタイザイリョウノキョクショデンキトクセイヒョウカニカンスルケンキュウ
Degree grantor/type: 大阪大学
Date Granted: 平成20年3月25日
Date Granted (W3CDTF): 2008
Dissertation Number: 甲第12588号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2008-D437
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009403055
http://id.ndl.go.jp/bib/000009403055
Bibliographic Record Category (NDL): 213