図書

EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008 : Dresden, Germany. : EMLC2008 : Jan 2008, Dresden, Germany. (SPIE Proceedings ; 6792)

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EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008 : Dresden, Germany. : EMLC2008 : Jan 2008, Dresden, Germany.

(SPIE Proceedings ; 6792)

Call No. (NDL)
M17-08-1645
Bibliographic ID of National Diet Library
000009405198
Material type
図書
Author
VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)ほか
Publisher
SPIE
Publication date
c2008.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
ISBN
9780819469564
ISSN (series)
0277-786X
Publication, Distribution, etc.
Publication Date
c2008.
Publication Date (W3CDTF)
2008