EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008 : Dresden, Germany. : EMLC2008 : Jan 2008, Dresden, Germany. (SPIE Proceedings ; 6792)

EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008 : Dresden, Germany. : EMLC2008 : Jan 2008, Dresden, Germany.

(SPIE Proceedings ; 6792)

Call No. (NDL): M17-08-1645
Bibliographic ID of National Diet Library: 000009405198

Material type: 図書

Author: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)ほか

Publisher: SPIE

Publication date: c2008.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) : ill. ; 28 cm.

NDC: -

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Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 9780819469564
ISSN (series): 0277-786X
Title: EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008 : Dresden, Germany. : EMLC2008 : Jan 2008, Dresden, Germany.
Series Title: SPIE Proceedings ; 6792
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6792.
Author Heading: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
Behringer, Uwe F. W.
Maurer, Wilhelm.
Waelpoel, Jacques.
European Mask and Lithography Conference (24th : 2008 : Dresden, Germany)
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2008.
Publication Date (W3CDTF): 2008
Extent: 1 v. (various pagings) : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Masks -- Congresses.
Microlithography -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-08-1645
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009405198
http://id.ndl.go.jp/bib/000009405198
OCLC No.: 230258553
https://www.worldcat.org/oclc/230258553
Bibliographic Record Category (NDL): 215