博士論文

Study on diamond formation and behaviors of carbon atoms in low-pressure inductively coupled plasma

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Study on diamond formation and behaviors of carbon atoms in low-pressure inductively coupled plasma

Call No. (NDL)
UT51-2008-L52
Bibliographic ID of National Diet Library
000009786426
Material type
博士論文
Author
Haruhiko Ito [著]
Publisher
[Haruhiko Ito]
Publication date
[2008]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
名古屋大学,博士 (工学)
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博士論文

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Paper

Material Type
博士論文
Author/Editor
Haruhiko Ito [著]
Author Heading
伊藤, 治彦 イトウ, ハルヒコ
Publication, Distribution, etc.
Publication Date
[2008]
Publication Date (W3CDTF)
2008
Extent
1冊
Alternative Title
低圧誘導結合型プラズマを用いたダイヤモンド形成と炭素原子の挙動に関する研究 テイアツ ユウドウ ケツゴウガタ プラズマ オ モチイタ ダイヤモンド ケイセイ ト タンソ ゲンシ ノ キョドウ ニ カンスル ケンキュウ
Degree grantor/type
名古屋大学