A study on the reliability of metal gate-La2O3 thin film stacked structures

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Material Type: 博士論文
Title: A study on the reliability of metal gate-La2O3 thin film stacked structures
Author/Editor: Joel Molina Reyes [著]
Author Heading: Molina Reyes Joel モリナレイエスホエル
Publication, Distribution, etc.: [Joel Molina Reyes]
Publication Date: [2007]
Publication Date (W3CDTF): 2007
Extent: 1冊
Alternative Title: メタルゲート/La2O3構造における信頼性の検討メタルゲート
Degree grantor/type: 東京工業大学
Date Granted: 平成19年6月30日
Date Granted (W3CDTF): 2007
Dissertation Number: 甲第6977号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2008-M99
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009900724
http://id.ndl.go.jp/bib/000009900724
Bibliographic Record Category (NDL): 213