Materials science in microelectronics / E.S. Machlin.

• Material Type: 図書
• ISBN: 008044640X (v. 1); 9780080446400 (v. 1); 0080446396 (v. 2); 9780080446394 (v. 2)
• Title: Materials science in microelectronics / E.S. Machlin.
• Edition: 2nd ed.
• Author Heading: Machlin, E. S.
• Publication, Distribution, etc.: Amsterdam : Elsevier; Boston : Elsevier
• Publication Date: 2005-2006.
• Publication Date (W3CDTF): 2005
• Extent: 2 v. : ill. ; 24 cm.
• Place of Publication (Country Code): NL
• Text Language Code: eng
• Subject Heading: Thin films.; Microelectronics.
• LCC: TK7871.15.F5
• DDC: 612.38152; 621.38152
• NDLC: ND351
• Note (General): Related URL: Publisher description http: //www.loc.gov/catdir/enhancements/fy0629/2005934958-d.html.
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND351-B21
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000010017575; http://id.ndl.go.jp/bib/000010017575
• LC Control Number: 2005934958; https://lccn.loc.gov/2005934958
• OCLC No.: 63692543; https://www.worldcat.org/oclc/63692543
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211

• Contents: v. 1. The relationships between thin film processing and structurev. 2. The effects of structure on properties in thin films.(Provided by: 国立国会図書館蔵書)