MEMS針端の形状変化のTEMその場観察と電気・機械特性の同時測定

Notes on use

Search by Bookstore

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 博士論文
Title: MEMS針端の形状変化のTEMその場観察と電気・機械特性の同時測定
Title Transcription: MEMS シンタンノケイジョウヘンカノ TEM ソノバカンサツトデンキキカイトクセイノドウジソクテイ
Author/Editor: 石田忠 [著]
Author Heading: 石田, 忠イシダ, タダシ
Publication, Distribution, etc.: [石田忠]
Publication Date: [2008]
Publication Date (W3CDTF): 2008
Extent: 1冊
Alternative Title: In-situ TEM observation of structural change of MEMS tips and simultaneous electrical/mechanical measurement
Degree grantor/type: 東京大学
Date Granted: 平成20年3月24日
Date Granted (W3CDTF): 2008
Dissertation Number: 甲第23440号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2008-S81
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010056708
http://id.ndl.go.jp/bib/000010056708
Bibliographic Record Category (NDL): 213